Semiconductor Engineering

Reducing Rework In CMP: An Enhanced Machine Learning-Based Hybrid Metrology Approach

The semiconductor industry is constantly marching toward thinner films and complex geometries with smaller dimensions, as well as newer materials. The number of chemical mechanical planarization (CMP) ...
EDN

Applied announces low down-force, low-k CMP machine

SANTA CLARA, Calif. — Applied Materials Inc. has announced the Reflexion LK chemical mechanical polishing (CMP) system, a machine that has a “low down-force” and is intended to planarize a range of ...
Electronic Design

Make the Move to Machine Learning, Neural Networks for CMP Modeling

Machine learning (ML), neural networks (NNs), and deep learning have many applications in different areas of modern industry and life. Their ability to “learn” how to analyze and predict imprecise ...
EDN

CMP foundry expands services, capacity

SAN JOSE, Calif. &#151 Entrepix Inc., a provider of chemical mechanical polishing (CMP) foundry and equipment services, is taking its business model to the next level. Entrepix (Tempe, Ariz.), ...