This article describes a six-inch wafer inspection microscope that provides automated, reproducible differential interference contrast (DIC) imaging, regardless of the user’s skill level. Wafer ...
Defect detection requirements on the order of 10 defective parts per million (DPPM) are driving improvements in inspection tools’ resolution and throughput at foundries and OSATs. However, defects ...
ATR spectroscopy is a surface-sensitive method of infrared sampling, which is commonly used in the analysis of thin films and monolayers on surfaces. Areas that require this approach include the ...
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