FREMONT, Calif.--(BUSINESS WIRE)--July 6, 2004--SensArray(R) Corporation, an innovative provider of process optimization tools for semiconductor fabrication, announces availability of its Integrated ...
MILPITAS, Calif.--(BUSINESS WIRE)--KLA-Tencor (NASDAQ: KLAC) today released its next-generation in-situ plasma etch wafer temperature measurement product, the EtchTemp SensorWafer™. The newest ...
Fremont-based SensArray Corp., a provider of thermal measurement solutions for semiconductor fabrication, has appointed Gary Knudson as vice president of sales and customer support. Knudson, who ...
MILPITAS, USA: KLA-Tencor released its next-generation in-situ plasma etch wafer temperature measurement product, the EtchTemp SensorWafer. This SensorWafer from KLA-Tencor’s SensArray division, ...
Developed through collaboration with leading IC manufacturers and original equipment manufacturers (OEMs), the EtchTemp™-SE (ET-SE), ScannerTemp™ and WetTemp™-LP products enable customers to monitor ...
“Leading-edge device manufacturers are facing extremely tight patterning specifications,” said Oreste Donzella, chief marketing officer at KLA-Tencor. “To understand patterning errors, chipmakers need ...
With advances in new technology it is getting more important to monitor all aspects of the influencing parameters in critical etch steps and utilize them as tuning knobs for within-wafer uniformity ...
tag: SensArray EtchTemp-SE technology Correlation Study of Actual Temperature Profile and In-line Metrology Measurements for Within-Wafer Uniformity Improvement and Wafer Edge Yield Enhancement By KLA ...
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